Production Evaporation

Like the V2000 series production sputtering tools, the E2000 production evaporator is designed specifically for the end user's requirements.

Recent designs have included:

• Single or multi-hearth e-beam guns (single up to 200cc capacity)
• Multi-boat thermal evaporation set up
• Substrate heating & monitoring systems (up to 650°C)
• Substrate fixturing systems to include planetary motion, rotary motion & linear motion
• Deposition rate monitors & control systems
• Ion assisted deposition and substrate cleaning
• Reactive gas admission for oxide/nitride production
• Turbopump & Polycold for fast pumpdown

All systems are controlled by a PLC based Control System, via a built-in industrial PC or Human-Machine Interface (HMI).