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E-Beam Evaporation Systems for Research

research 1SVS's e6000 range of Electron Beam Evaporation systems for research mirrors the production range.

Featuring the same quality of design & parts but manufactured on a smaller scale, the e6000 research coaters are ideally suited for universities and research laboratories.

Many options are available for the  e6000 e-beam system including:

  • Wet/dry roughing pump options from 20 m3.hr-1 to 110 m3.hr-1
  • Turbo/Cryo high vacuum pumping options from 400 ltrs.sec-1 to 2,200 ltrs.sec-1
  • Deposition monitoring & control
  • Reactive Ion Beam milling and Ion assisted deposition
  • Multihearth electron beam guns, available in 4 x 4cc, 4 x 25cc, 6 x 15cc or trough options
  • Single pocket e-beam guns with pocket size options up to 100cc
  • 3kW, 6kW, 8kW, 10kW and 12kW solid state or tetrode power supply options
  • X-Y sweep control and crucible indexer controllers
  • Cullotte or Planetary substrate rotary tables
  • Substrate rotation up to 50rpm
  • Substrate heating to 800oC
  • Substrate cooling below 50oC during the most aggressive deposition processes
  • Multiple process gases for reactive deposition using positive shut-off mass flow controllers.
  • Full system automation with colour touch screen pc, SCADA software and PLC control.
  • Datalogging of all major process parameters
  • loadlock entry system for single or multiple wafer processing
  • Glovebox connection options.
  • Full CE marked.

For more infomation Enquire Now.

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