e2000 Production Evaporation Systems
Like the V2000 series production sputtering systems, the e2000 production evaporators are individually configured around the end user's requirements.
The e2000 systems take advantage of the latest technology, with a wide range of available options:
- Single or multi-hearth e-beam guns (single up to 200cc capacity)
- Multi-boat thermal evaporation
- Substrate heating (up to 650°C)
- Substrate fixturing systems include planetary and rotary motion
- Deposition rate monitors & control systems
- Substrate cleaning and Ion assisted deposition
- Reactive gas admission
- Cryo pumping or Turbopump & Polycold for fast pumpdown
- All systems are controlled by a PLC based Control System, via a built-in industrial PC or Human-Machine Interface (HMI).
- Datalogging of all major process parameters
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