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Scientific Vacuum Systems Limited
Specialist manufacturers of sputtering and evaporation
Physical Vapour Deposition (PVD) Systems
Products range from small batch sputtering and evaporation systems to fully automatic load-lock and in-line PVD systems, catering for both R & D and high volume production environments.
SVS encompass the technology fields of:
- DC magnetron
- RF magnetron
- Pulsed DC reactive magnetron sputtering
- PECVD (Plasma Enhanced Chemical Vapour Deposition)
- Electron beam and thermal evaporation
- Ion beam milling
- Ion cleaning
- IAD (Ion Assisted Deposition)
Please see our Products pages for details of our range of systems, or our Services pages for details of Upgrade and other services. Also in the Services section are details of the Control Systems that we build for both new and upgraded systems.
NEWS FLASH – FEB 2009
SVS supply the first production V2400LL Load Lock Sputtering System
for 6-inch Wafer processing.
SVS Launch their Brand New V2400LL range of production sputtering systems for 6-inch wafer processing to complement the existing V2000 range of PVD systems.
The V2400LL incorporates the following features:
- 6-inch wafer capability
- Load Lock chamber capable of loading up to 25 wafers per batch
- Up to four targets can be mounted in the process chamber
- Deposition uniformity of ±1% (4-inch wafer) and ±2.5% (6-inch wafer)
- RF Etch and bias capability
- Substrate heating or cooling
- Sputtering of metals and compounds using DC, RF and DC pulse reactive sputtering
- Full system automation and datalogging
- Load Lock pumpdown time to 5 x 10-6 Torr in less than 7 minutes
- <1 x10-7 Torr ultimate pressure achievable in the process chamber
- Through-Wall access to Load Lock allows system to be installed outside the cleanroom
